Process Reliability Engineer

The Role 

Entegris is currently seeking a Process Reliability Engineer to join our Engineering & Maintenance team. This position will be based in our Aurora, Illinois facility. This position is embedded within the 845 Slurry production area, one of our core manufacturing operations supporting advanced semiconductor fabrication. 

In this role, you will serve as the technical subject matter expert for process and support equipment reliability across the Slurry production area. You will drive improvements in equipment uptime, asset lifecycle management, and maintenance effectiveness while collaborating with Operations, Maintenance, and Engineering teams to deliver safe, consistent, and high-quality manufacturing results. 

The position reports to the Senior Maintenance Manager.  

What You’ll Do 

Reliability Analysis & Asset Lifecycle Planning 

• Build and maintain the Criticality Analysis plus Critical Spare Parts assessments for all production equipment. 

• Develop and maintain an equipment replacement/repair roadmap driven by reliability data, asset age, and lifecycle cost analysis. 

• Calculate equipment reliability metrics (MTTR, MTBF, etc.) and perform root cause failure analyses (RCFA) to identify failure patterns, prioritize maintenance resources, and reduce unplanned downtime. 

• Build Reliability Block Diagrams (RBD) for critical systems to assess single-point-of-failure risks and model overall system availability (OEE). 

Factory Floor Technical Support – Provide SME technical support for key production systems (chemical addition, batch-making, product filling, ultra-pure water, hot oil, process chillers, wastewater, etc.), ensuring uptime and optimal performance. Identify opportunities and run associated projects to improve overall system design. 

Project Management: Lead small to medium scale capital and CI projects from inception through completion. Responsibilities include budgeting, project definition utilizing front end loading (FEL), securing funding, following through to commissioning/start up, providing project status updates, managing and completing all aspects of commissioning, and project closure/lessons learned. 

Maintenance Support: Develop and refine preventive and reactive maintenance procedures and spare parts inventory processes using tools like SAP-PM, Parsable, SharePoint, and Reliance. Train maintenance personnel as warranted. 

Engineering Documentation: Manage and produce engineering drawings (P&IDs, electrical schematics, etc.) and documentation (equipment specifications, maintenance repair procedures) using AutoCAD and similar tools. 

EHS Support: Participate in Environmental, Health, and Safety projects focusing on process safety management, ergonomic improvements, and compliance with safety standards. Support and lead EHS teams as needed. 

Continuous Learning and Improvement: Stay informed of industry trends, new technologies, and best practices to continually enhance your knowledge and the company’s manufacturing capabilities. 

What We Seek 

  Education & Experience 

• Bachelor’s degree in Chemical, Mechanical, or Electrical Engineering required. 

• Minimum 5 years of experience in a manufacturing environment, preferably in the chemical, specialty materials, or semiconductor supply chain industry. 

Technical Skills 

• Proficiency with CMMS platforms, specifically SAP-PM; experience with Parsable, SharePoint, Reliance, and MS Project is beneficial. 

• Proficient with Microsoft Office Suite; AutoCAD experience required for P&ID and schematic management. 

• Knowledge of predictive and preventive maintenance methodologies, failure analysis, risk management, and lifecycle asset management. 

• Familiarity with batch manufacturing, piping systems, dispersion and separation process equipment, utility systems, and PLC operation preferred. 

Core Competencies 

• Demonstrated ability to lead projects, manage competing priorities, and deliver results in a dynamic manufacturing environment. 

• Excellent problem-solving skills with a data-driven approach to decision-making. 

• Strong verbal and written communication skills; ability to present technical content to both technical and non-technical audiences. 

• Collaborative team player who drives results through influence and partnership across operations, maintenance, and engineering functions. 

Additional Qualifications 

• Familiarity with health, safety, and environmental regulations in a manufacturing context required. 

• Six Sigma Green Belt certification is a plus. 

• Ability to lift up to 25 lbs; ability to work in a chemical manufacturing environment. 

Why Work at Entegris 

Lead. Inspire. Innovate. Define Your Future. 

Not everyone who works for a global company shares the same background, experiences and perspectives. We leverage the differences of our employees to bring new ideas to the table. Every employee throughout the company is encouraged to share input on projects and initiatives. Our decision-making process is truly a collaborative effort as we realize there are leaders at every level of the organization. We put our values at the core of how we operate as an organization — not just when it’s convenient, but in a lasting and meaningful way. We want the time and energy you spend here to have a positive impact on your life inside and outside of the office. 

What We Offer 

Our total rewards package goes above and beyond just a paycheck. Whether you’re looking to build your career, improve your health, or protect your wealth, we offer generous benefits to help you achieve your goals. 

• Compensation: $91,000 - $122,500 per year range with actual pay dependent on candidate overall skills for the role

• Annual bonus eligibility

• Progressive paid time off policy that empowers you to take the time you need to recharge

• Generous 401(K) plan with an impressive employer match with no delayed vesting 

• Excellent health, dental and vision insurance packages to fit your needs

• Education assistance to support your learning journey

• A values-driven culture with colleagues that rally around People, Accountability, Creativity and Excellence

​Entegris does not provide immigration-related sponsorship for this role. Do not apply for this role if you will need Entegris immigration sponsorship (e.g., H1B, TN, STEM OPT, etc.) now or in the future. 

At Entegris we are committed to providing equal opportunity to all employees and applicants. Our policy is to recruit, hire, train, and reward employees for their individual abilities, achievements, and experience without regard to race, color, religion, sexual orientation, age, national origin, disability, marital or military status. 

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