Senior Engineer Sustaining Systems Engineering

Job Opportunity: Sr. Engineer, Sustaining Systems Engineering.  

Location: Ansan, South Korea. 
Division: Materials Solutions (MS) 
Reports To: Director of Fab Technology and Engineering 

Core Purpose of the Role 

The Sustaining Systems Engineer will provide technical leadership and systemlevel ownership for the installed base of chemistry delivery cabinets used to supply precursors and specialty chemicals to semiconductor process tools. This role requires a strong understanding of mechanical, electrical, fluid, thermal, software/controls, and safety subsystems, and how they interact to deliver reliable and safe chemical distribution performance. 

The engineer will focus on system reliability, configuration management, safety compliance, rootcause analysis, and continuous improvement across the product line. Close collaboration with equipment engineers, field service teams, vendors, and crossfunctional groups is essential to ensure maximum uptime and robust system performance. 

Entegris is seeking a highly motivated, customer-centric Global Sustaining Systems Engineer to support our deployed Precursor Delivery Systems Product Line globally. This role is essential to ensuring safe, high-quality, and timely installations and upkeep while driving strategic capacity-building initiatives to support our internal team and our customers and expand our market presence. 

This role is post-release sustaining focused (installed-base reliability and standardization) and does not own new product development or initial deployment/commissioning activities. 

Key Responsibilities 

1. System Ownership & Sustaining 

• Own the full system behavior of chemistry delivery cabinets, including chemical handling modules, gas panels, pumps, valves, heaters, sensors, safety interlocks, PLC/controls, and communication interfaces. 

• Maintain product configuration control, systemlevel specifications, and documentation across the installed base. 

• Drive system reliability improvements through parts upgrades, hardware redesign proposals, and control logic optimization. 

• Develop and maintain system performance dashboards, including reliability metrics, alarms, and trending databases. 

2. System Reliability & Performance 

• Monitor system health across mechanical, electrical, and control subsystems. 

• Analyze pressure, flow, temperature, sensor feedback, and control logic data to detect early signs of degradation or impending failures. 

• Lead efforts to reduce downtime, improve mean time between failures (MTBF), and optimize system-health monitoring thresholds and diagnostic coverage. 

• Evaluate new chemistries and ensure system compatibility (materials, wetted surfaces, corrosion risks, thermal stability). 

3. Troubleshooting & Root Cause Analysis 

• Provide system-level analysis and recommendations for complex issues escalated through formal sustaining/reliability review processes (chemistry flow interruptions, valve actuation anomalies, pressure instability, interlock faults, PLC logic issues). 

• Conduct structured rootcause analyses (5Why, Fishbone, Fault Tree Analysis, DMAIC, 8D). 

• Develop corrective and preventive actions (CAPAs) and work with crossfunctional teams to implement them. 

• Interface with component suppliers and OEMs to resolve highimpact or recurring system issues. 

4. Controls & Software Coordination 

• Support troubleshooting of PLC sequences, system alarms, safety logic, and communication issues with host tools. 

• Partner with software/controls engineers on patch qualifications, control logic enhancements, and safety interlock updates. 

• Validate firmware, control logic changes, and diagnostic tools before deployment to the field. 

5. Continuous Improvement & Product Line Enhancement 

• Identify opportunities to enhance system reliability, reduce costofownership, and simplify maintenance workflows. 

• Support engineering change orders (ECOs), system retrofits, new component evaluations, and design-for-reliability (DfR) initiatives. 

• Drive improvements in thermal management, chemical stability, flow delivery performance, and system diagnostics. 

• Participate in new product introduction (NPI) from sustaining perspective, ensuring lessons learned are incorporated into future designs. 

6. Documentation & CrossFunctional Support 

• Create and maintain systemlevel documentation, including troubleshooting guides, BKMs, failure analysis reports, and safety protocols. 

• Provide training and technical support to manufacturing, equipment engineering, and field service teams. 

• Communicate system health trends, reliability risks, and improvement roadmaps to sustaining leadership and stakeholders. 

Qualifications 

Required 

• Bachelor’s degree in Systems Engineering, Mechanical Engineering, Chemical Engineering, Electrical Engineering, or related field. 

• 5-10+ years of experience working with chemical delivery systems, highpurity fluid systems, or complex electromechanical semiconductor equipment. 

• Strong understanding of:  

• Fluid delivery systems (liquid/solid precursor handling, flow control, pressure regulation) 

• Thermal management and heated delivery lines 

• Electrical/controls systems, PLC logic, and safety interlocks 

• Systemlevel safety protocols for hazardous chemicals 

• Proven ability to perform systemlevel troubleshooting and multidisciplinary rootcause analysis. 

• Ability to travel internationally up to 60%. 

• English proficiency required. 

Preferred 

• Experience with chemical delivery cabinets supporting ALD, CVD, MOCVD, or wet process tools. 

• Familiarity with gas/chemical distribution standards (e.g., SEMI S2, S6, F1, F19). 

• Experience with highpurity component specifications (valves, heaters, mass flow controllers, pressure regulators). 

• Knowledge of diagnostic scripting, data analysis (Python, JMP), or control logic tools. 

• Strong background in reliability engineering (HALT/HASS, FMEA, MILSTD reliability methods). 

Key Competencies 

• Strong systemlevel thinking and crossdisciplinary understanding 

• Excellent analytical and troubleshooting skills 

• High regard for safety and compliance 

• Clear communication with technical and nontechnical stakeholders 

• Ability to lead complex, multiteam technical investigations 

• Ownership mindset for product line health and longterm reliability 

Success Metrics 

Success in this role is measured not only by project outcomes but also by how those outcomes are achieved. Key competencies include: 

• Safety First: Promote and maintain a safe work environment. 

• Team Building and Collaboration: Share knowledge and support team success. 

• Accountability: Take ownership of tasks and deliver results. 

• Customer Centricity: Prioritize customer needs and satisfaction. 

• Adaptability: Thrive in a fast-paced, evolving environment. 

• Communication: Effectively engage across all levels of the organization and with customers. 

Why Join Us? 

• Be part of a global leader in advanced materials and delivery systems. 

• Work on high-impact projects with cross-functional and international teams. 

• Drive innovation and capacity growth in a critical industry sector. 

• Enjoy competitive compensation, professional development, and global exposure.