Job Title:
Senior Engineer, Sustaining Mechanical EngineeringJob Description:
Job Opportunity: Sr. Engineer, Sustaining Mechanical Engineering.
Location: Ansan, South Korea.
Division: Materials Solutions (MS)
Reports To: Director of Fab Technology and Engineering
Core Purpose of the Role
The Sustaining Mechanical Engineer will support the installed base of precursor delivery cabinets and chemical distribution modules used in advanced semiconductor manufacturing. This role focuses on hardware reliability, safety compliance, mechanical integrity, and continuous improvement of precursor delivery systems.
The engineer will work closely with equipment engineering, field service, chemical supply teams, and vendors to ensure safe, stable, and high-availability operation of ALD/CVD precursor delivery hardware.
Entegris is seeking a highly motivated, customer-centric Global Sustaining Mechanical Engineer to support our deployed Precursor Delivery Systems Product Line globally. This role is essential to ensuring safe, high-quality, and timely installations and upkeep while driving strategic capacity-building initiatives to support our teams, our customers and expand our market presence.
This role is focused on post-release sustaining of the installed base (reliability, standardization, and safety compliance) and does not own new product development or initial product deployment/commissioning.
Key Responsibilities
1. Hardware Sustaining & Tool Ownership
Serve as the primary owner for precursor delivery cabinets (PDCs), including gas boxes, vaporizer systems, valve manifolds, and associated mechanical assemblies.
Maintain system configuration, BOM accuracy, and mechanical standards across the installed base.
Monitor system performance, pressure stability, flow characteristics, leak rates, and mechanical wear.
Evaluate and qualify replacement parts, upgraded hardware, and new precursor delivery components.
2. Mechanical Reliability & Safety
Ensure all precursor delivery systems meet safety standards—including pressure integrity, leak rate spec, interlocks, hazardous chemical protocols, and cleanroom safety requirements.
Conduct mechanical health assessments (e.g., regulator performance, heater uniformity, seal condition, valve actuation).
Lead investigations of mechanical failures such as leaks, component degradation, flow restrictions, and thermal nonuniformities.
Partner with EHS teams to ensure compliance with chemical handling regulations and cabinet safety certifications.
3. Troubleshooting & Root Cause Analysis
Support internal field and operations teams by analyzing hardware escalations, cabinet alarms, abnormal pressure/flow conditions, and precursor delivery interruptions.
Perform structured problem solving (5Why, Ishikawa, DMAIC, 8D) to identify root causes of failures.
Work with technicians and field service to develop corrective and preventive actions.
Drive issue resolution with OEMs and component suppliers when needed.
4. Continuous Improvement & Hardware Upgrades
Identify opportunities to improve system uptime, extend component life, reduce maintenance frequency, and improve costofownership.
Support retrofit projects (e.g., new valve types, improved vaporizers, heater redesigns, cabinet layout optimization).
Create/Support engineering change orders (ECOs), mechanical drawings updates, and controlled configuration changes.
Evaluate new precursor chemistries and assess mechanical compatibility (materials, thermal stability, corrosion risks).
5. Technical Documentation & CrossFunctional Support
Develop and maintain Best Known Methods (BKMs), mechanical procedures, troubleshooting guides, and safety documentation.
Provide training to technicians, manufacturing personnel, and sustaining engineers on safe and proper handling of delivery systems.
Provide engineering standards, documentation, and technical guidance for installation and acceptance activities executed by Field Service and Manufacturing teams (as applicable).
Communicate performance trends, reliability risks, and improvement plans to the sustaining team leadership.
Qualifications
Required
Bachelor’s degree in Mechanical Engineering, Chemical Engineering, Materials Engineering, or related discipline.
5–10+ years of experience working with gas delivery systems, chemical delivery hardware, or mechanical systems in semiconductor or related highpurity environments.
Strong understanding of:
Pressure systems, regulators, fittings, valves
Thermal management and temperaturecontrolled delivery systems
Highpurity gas and chemical handling
Mechanical reliability and failure analysis
Demonstrated troubleshooting skills with mechanical assemblies and fluid/thermal systems.
Ability to work handson in a cleanroom or chemical delivery environment.
Ability to travel internationally up to 60%.
English proficiency required.
Preferred
Experience with ALD/CVD precursor delivery (solid, liquid, heated lines, bubblers, vaporizers).
Familiarity with MOCVD or semiconductor gas cabinets, VMBs/VMPs, and highpurity chemical distribution.
Strong understanding of chemical compatibility, corrosion, materials of construction, and safety standards.
Experience using CAD tools (SolidWorks, Creo, AutoCAD) for mechanical component review.
Knowledge of data analysis tools (JMP, Python, Excel) for performance trending.
Key Competencies
Strong mechanical aptitude and handson problem solving
High commitment to safety and regulatory compliance
Clear communication and crossfunctional collaboration
Analytical mindset with attention to detail
Ability to work independently and drive improvement projects
Success Metrics
Success in this role is measured not only by project outcomes but also by how those outcomes are achieved. Key competencies include:
Safety First: Promote and maintain a safe work environment.
Team Building and Collaboration: Share knowledge and support team success.
Accountability: Take ownership of tasks and deliver results.
Customer Centricity: Prioritize customer needs and satisfaction.
Adaptability: Thrive in a fast-paced, evolving environment.
Communication: Effectively engage across all levels of the organization and with customers.
Why Join Us?
Be part of a global leader in advanced materials and delivery systems.
Work on high-impact projects with cross-functional and international teams.
Drive innovation and capacity growth in a critical industry sector.
Enjoy competitive compensation, professional development, and global exposure.
Top Skills
What We Do
Artificial intelligence, augmented reality, Internet of Things – these are not just trends, they are drivers changing the way people live across the globe. With these new drivers and the increasing speed of innovation, there comes an expectation for higher-quality, higher-performing technologies at a faster pace.
Every day, and for more than 50 years, Entegris’ singular mission has been to help customers utilize our advanced science-based solutions to support demand drivers; to innovate faster and more efficiently; and ultimately to transform the world. Through the power of our solutions and technology expertise, Entegris provides customers with innovative, science-based solutions to their toughest technology challenges.
Headquartered in Billerica, Massachusetts, Entegris employs approximately 5,800 people worldwide, with roughly half employed in Asia-Pacific or Europe.
With research and development, customer service, analytical labs, and manufacturing in Asia-Pacific, North America and Europe, Entegris supports customers around the globe as they take technology to the next level.








