Computer science/applied mathematics internship: scan predictor diagnostics

The image alignment EUV group consists of a balanced team of about 20 junior and senior metrologists, who closely collaborate to continuously achieve the perfect alignment of patterns from reticle to wafer using expose side sensors to achieve maximum yielding dies. To reach our goal we study machine behavior to create models and sequences realized in scanner software. Our scope comprises all EUV scanners in the field, and the EUV scanners of the future, which creates for a dynamic and exciting environment to work in.

Our metrology sequencing subfunction orchestrates the behavior of powerful mechatronic modules, so that together they achieve an extraordinary combination of speed and accuracy. It’s basically the brain of ASML lithography systems. To make sure our customer can keep printing smaller and smaller features on chips using our machines, we need people who can help us create next-generation metrology products. Expose Sequence team is like the conductor of all the actions while exposing wafers. Taking into account all interdependencies are satisfied, and optimizing for maximum wafer throughput, while ensuring minimum impact to overlay performance (e.g. due to thermal or timing effects).

In ASML, a data analysis platform was implemented some time ago. The idea behind it is to provide a common analysis platform to stakeholders. ASML machines create large amounts of data in various formats. By means of plugins, different data formats can be made available in the metro analyzer. In the same way, plugins allow us to add analyzing capabilities to the platform.

Different stakeholders need to dissect the behavior and performance of our machines at various calibration steps for this reason. We use MATLAB as a framework of choice, and we want to extend our current toolbox with new facilities to better make use of the latest diagnostics data.

Your assignment

We have a prediction functionality that is used to predict the time needed to perform exposures on the wafer. For this functionality we would like to have some post processing tooling. Your assignment is to create this post processing tooling and embed it in an already existing diagnostics framework. The data will be on XML format. The existing framework already contains a tool (implemented in MATLAB) which is very similar to the tool that we need, so inspiration can be drawn from this existing tool. 

Your tasks may include, but are not limited to:

• Familiarize yourself with existing ASML Metrology tooling frameworks, diagnostics data, and data policies;

• Design, implement and validate an extension to our tooling framework;

• Document your work for knowledge transfer.

Your Profile

To be a perfect match for this internship, you:

• Are busy with your master's in computer science, data science or a related field like (applied) physics, engineering or (applied) mathematics;

• Are skilled in programming tools such as MATLAB and/or Python;

• Are familiar with object oriented design principles;

• Are able to analyze and visualize data;

• Are solution oriented and have a hands-on mentality;

• Have good communication skills in English (verbal and written).

​This is a master graduation internship with a duration of a minimum of 9 months, for 4-5 days a week, starting as soon as possible.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).